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Hitachi

Semiconductor Laser Annealing Tool

Features

  • CW (Continuous Wavelength) irradiation and Pulsed irradiation are possible and using High-power Semiconductor Laser as a laser source.
  • Shaped Laser Beam Technology and Auto Focus Technology are adopted.
  • Laser Beam can be focused on the surface of target materials.
  • Simple operations allow the user to set parameter and function by PC.
  • 2 types of laser wavelength are prepared as product line.
  • Handling Tool can be prepared. (Optional)

Photo：Semiconductor Laser Annealing Tool (Overview)
Overview

Photo：Semiconductor Laser Annealing Tool (Inside of the Tool)
Inside of the Tool

Purposes & Examples

This tool can be used not only for anneal process but also Punching, Cutting process for various materials such as organic and inorganic thin film and wafer etc.

Photo: Example1
<Example1>
Crystallization on Phase-change Material
(Ge-Sb-Te)
(POL-A3）

Photo: Example2
<Example2>
Punching of Thin Film Silicon (POL-A1)
Hole Size: 18um
Interval: X,Y,Z direction200μm

Photo: Example3
<Example3>
Crystallization of Thin Film Silicon
(POL-A1)

Specification

Specification
Model POL-A1 POL-A3
Laser
Head 		Wavelength,
Max Laser Output 		405 +/-5nm, 360mW 810 +/-10nm, 2600mW
Spot Size of
Long Axis 		Approx. 18um Approx. 30, 50, 100, 200um
Spot Size of
Short Axis 		Approx. 0.5um Approx. 1um
Maximum Object Size 8inch wafer, 200 x 200mm Substrate
X-Y Stage Stage Motor Stepping Motor
Max Scan Speed 10 - 500mm/s
X-Axis Resolution 2um
Y-Axis Resolution 1um
Connect for External Output RS232C (For setting an annealing conditions)
Power Consumption 700VA
Air Supply 0.2 - 0.6MPa (For fixing the object on the tray)
Dimensions (W x H x D) Approx. 900 x 500 x 600mm
Weight Approx. 94kg
  • * Product specifications are subject to change without notice. Please feel free to contact us if you'd like more information.

Example of Annealing Sequence
(It can be matching for target work shape.)

Image: Example of Annealing Sequence

  1. If you have any issues you want to fix, we would propose our best solutions that satisfy your requirements. So please feel free to contact us at any time.
  2. In case of trying annealing various materials, sample annealing testing is available.
    Please feel free to contact us at any time.